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Proceedings Paper

Silicon photonic integrated circuit for on-chip spectroscopic gas sensing
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Paper Abstract

We present a chip-scale spectroscopic methane sensor, incorporating a tunable laser, sensor waveguides, and methane reference cell, assembled as a compact silicon photonic integrated circuit. The sensor incorporates an InP-based semiconductor optical amplifier/photodetector array, flip-chip soldered onto a silicon photonic substrate using highprecision waveguide-to-waveguide interfaces. The InP chip provides gain for a hybrid external cavity laser operating at 1650 nm. The sensor features a 20-cm-long TM-mode evanescent-field waveguide as the sensing element and is compatible with high-volume wafer-scale silicon photonics manufacturing and assembly processes. This sensor can be an enabling platform for economical methane and more general distributed environmental trace-gas monitoring.

Paper Details

Date Published: 4 March 2019
PDF: 6 pages
Proc. SPIE 10923, Silicon Photonics XIV, 109230G (4 March 2019); doi: 10.1117/12.2511793
Show Author Affiliations
Chi Xiong, IBM Thomas J. Watson Research Ctr. (United States)
Yves Martin, IBM Thomas J. Watson Research Ctr. (United States)
Eric J. Zhang, IBM Thomas J. Watson Research Ctr. (United States)
Jason S. Orcutt, IBM Thomas J. Watson Research Ctr. (United States)
Martin Glodde, IBM Thomas J. Watson Research Ctr. (United States)
Laurent Schares, IBM Thomas J. Watson Research Ctr. (United States)
Tymon Barwicz, IBM Thomas J. Watson Research Ctr. (United States)
Chu C. Teng, Princeton Univ. (United States)
Gerard Wysocki, Princeton Univ. (United States)
William M. J. Green, IBM Thomas J. Watson Research Ctr. (United States)


Published in SPIE Proceedings Vol. 10923:
Silicon Photonics XIV
Graham T. Reed; Andrew P. Knights, Editor(s)

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