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Proceedings Paper

Miniaturized electrically steerable mirror holder fabricated with an integral cutting conception
Author(s): Thomas C. Sidler; Eric Leiglon; Manuel Bouvier
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Paper Abstract

High precision laser cutting permits a new approach for the conception and realization of complex miniaturized components and systems necessitating very high absolute dimensional and assembling precision. The laser cutting with a pulsed TEM00 Nd:YAG-slab laser results in mechanical tolerances and a reproducibility better than 3 micrometers over working areas of up to 30 X 30 mm2. This permits not only to realize mechanical 2D-parts with very high dimensional precision but also the introduction of features for precise assembling of complex structures with very close tolerances without the need of delicate assembling procedures and machines. We present, as an example, an electrically steerable miniature mirror mount. In a volume of 10 by 10 by 4 mm3, a mirror with a clear aperture of 4 mm, an angular excursion of +/- 2 mrad and an axial excursion of 15 micrometers can be realized. The mechanical resonance lies between 200 and 600 Hz, depending essentially on the mirror mass and the stiffness of the flexure elements. Such a device can be used e.g. in laser resonators as passive or actively controlled mirror, in resonant cavities for SHG and THG or as a small Fabry-Perot spectrum analyzer.

Paper Details

Date Published: 23 September 1996
PDF: 5 pages
Proc. SPIE 2789, High-Power Lasers: Applications and Emerging Applications, (23 September 1996); doi: 10.1117/12.251178
Show Author Affiliations
Thomas C. Sidler, Ecole Polytechnique Federale de Lausanne (Switzerland)
Eric Leiglon, Ecole Polytechnique Federale de Lausanne (Switzerland)
Manuel Bouvier, Ecole Polytechnique Federale de Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 2789:
High-Power Lasers: Applications and Emerging Applications
Georges Sayegh; Michael R. Osborne, Editor(s)

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