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Proceedings Paper

Optical fiber Fabry-Perot acoustic sensor based on large PDMS diaphragm
Author(s): Han Zhou; Bingkun Wu; Mingguang Shan; Lei Liu; Haichao Yu; Zhi Zhong; Bin Liu
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Paper Abstract

An extrinsic Fabry-Perot interferometric fibre microphone based on polydimethylsiloxane, or PDMS, diaphragm was proposed. The large free-standing PDMS diaphragm, with a diameter of 4 mm, is prepared by a simple “spin-strip” process. The experimental result shows that the fabricated sensor has a high dynamic pressure sensitivity of about -136 dB re 1 rad/μPa in the range of 100~2000Hz. The noise equivalent acoustic signal level of the microphone, limited by the environmental noise, is about 1000 μPa/Hz1/2. And the dynamic range is tested to be more than 47.48 dB. The proposed microphone is expected to be used in the field of weak acoustic pressure testing.

Paper Details

Date Published: 7 March 2019
PDF: 7 pages
Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110531W (7 March 2019); doi: 10.1117/12.2511691
Show Author Affiliations
Han Zhou, Harbin Engineering Univ. (China)
Bingkun Wu, Harbin Engineering Univ. (China)
Mingguang Shan, Harbin Engineering Univ. (China)
Lei Liu, Harbin Engineering Univ. (China)
Haichao Yu, Univ. of Electronic Science and Technology of China (China)
Zhi Zhong, Harbin Engineering Univ. (China)
Bin Liu, Harbin Engineering Univ. (China)

Published in SPIE Proceedings Vol. 11053:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Jie Lin, Editor(s)

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