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Proceedings Paper

Characterization of beam splitter using Mueller matrix ellipsometry
Author(s): Song Zhang; Jiamin Liu; Hao Jiang; Shiyuan Liu
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Paper Abstract

Polarization distortion is a phenomenon which the polarization state of output light deviates from the theoretical expectation. Due to the design defects and process limitations, polarization distortion in beam splitter is inevitable, which results in the significant errors in the optical systems. A theoretical analysis method based on Mueller matrix is proposed for characterizing the beam splitter. In the propose approach, polarization distortion in the beam splitter including depolarization, linear and circular birefringence, and linear diattenuation, circular dichroism have been considered. With the proposed method, we can characterize the beam splitters and extract the related effective optical parameters of polarization distortion. The Mueller matrices of two different commonly used beam splitters measured by a commercial Mueller matrix ellipsometer (MME) are consistently fitted by the proposed method and the residual errors have shown the improvement compared to the conventional methods.

Paper Details

Date Published: 7 March 2019
PDF: 8 pages
Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110531M (7 March 2019); doi: 10.1117/12.2511510
Show Author Affiliations
Song Zhang, Huazhong Univ. of Science and Technology (China)
Jiamin Liu, Huazhong Univ. of Science and Technology (China)
Hao Jiang, Huazhong Univ. of Science and Technology (China)
Shiyuan Liu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 11053:
Tenth International Symposium on Precision Engineering Measurements and Instrumentation
Jiubin Tan; Jie Lin, Editor(s)

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