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Proceedings Paper

New generation of the miniature bimorph mirrors for compensation of the wavefront distortions
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Paper Abstract

As it is well-known, the laser radiation, propagated through different mediums, is affected by wavefront distortions and thus the quality of the radiation is significantly decreased. To compensate for the wavefront aberrations adaptive optics means are used. We developed miniature bimorph mirror with 37 electrodes. To manufacture this type of mirrors two technologies were used. Those are laser engraving technology for drawing electrode grid on the piezoceramic disc, and ultrasonic welding technology to connect wires to the control electrodes. Main parameters of such a deformable mirror were investigated and presented in this paper.

Paper Details

Date Published: 4 March 2019
PDF: 10 pages
Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 109310O (4 March 2019); doi: 10.1117/12.2510104
Show Author Affiliations
Vladimir Toporovsky, Moscow Polytechnic Univ. (Russian Federation)
Alexis Kudryashov, Moscow Polytechnic Univ. (Russian Federation)
Institute of Dynamics of Geospheres (Russian Federation)
Vadim Samarkin, Institute of Dynamics of Geospheres (Russian Federation)
Julia Sheldakova, Institute of Dynamics of Geospheres (Russian Federation)
Alexey Rukosuev, Institute of Dynamics of Geospheres (Russian Federation)
Arkadiy Skvortsov, Moscow Polytechnic Univ. (Russian Federation)
Danila Pshonkin, Moscow Polytechnic Univ. (Russian Federation)

Published in SPIE Proceedings Vol. 10931:
MOEMS and Miniaturized Systems XVIII
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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