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Proceedings Paper

LIGA-based family of tips for scanning probe applications
Author(s): Sandeep Akkaraju; Yohannes M. Desta; BenQiang Li; Michael C. Murphy; Olga Vladimirsky; Yuli Vladimirsky
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Paper Abstract

A LIGA based tool-set of tips for various scanning probe applications is under investigation by the LSU (mu) SET. This involves fabrication of `micro-columns' using LIGA, followed by an electrochemical sharpening process. Micro-columns ranging from 1.8 micrometers diameter and 14 micrometers tall to 165 micrometers X 165 micrometers and 1000 micrometers tall have been fabricated. In order to understand the sharpening mechanism, commercially available wires with diameters ranging from 25 - 800 micrometers were sharpened. A computer aided design tool, based on deforming finite elements, was developed to simulate the sharpening process.

Paper Details

Date Published: 13 September 1996
PDF: 8 pages
Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); doi: 10.1117/12.250951
Show Author Affiliations
Sandeep Akkaraju, Louisiana State Univ. (United States)
Yohannes M. Desta, Louisiana State Univ. (United States)
BenQiang Li, Louisiana State Univ. (United States)
Michael C. Murphy, Louisiana State Univ. (United States)
Olga Vladimirsky, Louisiana State Univ. (United States)
Yuli Vladimirsky, Louisiana State Univ. (United States)

Published in SPIE Proceedings Vol. 2880:
Microlithography and Metrology in Micromachining II
Michael T. Postek Jr.; Craig R. Friedrich, Editor(s)

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