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Proceedings Paper

Structured CVD-silicon carbonitride coatings
Author(s): Alexey G. Varlamov
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Paper Abstract

Using functional structured ceramic multielemental composition coatings as protective ones is going to become a modern tendency. For such coatings CVD-synthesis it is necessary to use precursors gas mixture that are potentially able to educe several condensed compounds. Then, under certain synthesis conditions `hard solution' type complex compounds (oxicarbides, oxinitrides, carbonitrides etc.) are produced as a result of a heterogeneous reaction, proceeding on active centers, macroscopically continuously and evenly distributed all over the surface. Different synthesis conditions result in different composition condensed products deposition (different elements correlation). The synthesis conditions changing during the deposition process lead to layer-by-layer coating composition changing, that is to an in situ structured coating obtaining. In the present work the `hard solution' type variable composition compounds CVD obtaining possibility is considered with the SiNC- coatings synthesis as an example.

Paper Details

Date Published: 13 September 1996
PDF: 10 pages
Proc. SPIE 2875, Microelectronic Device and Multilevel Interconnection Technology II, (13 September 1996); doi: 10.1117/12.250887
Show Author Affiliations
Alexey G. Varlamov, Institute of Structural Macrokinetics (Russia)

Published in SPIE Proceedings Vol. 2875:
Microelectronic Device and Multilevel Interconnection Technology II
Ih-Chin Chen; Nobuo Sasaki; Divyesh N. Patel; Girish A. Dixit, Editor(s)

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