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Proceedings Paper

Thin-cavity interferometric sensors for detection of weak radiation flux and microvibrations
Author(s): Maurice Patrick Whelan; Robert P. Kenny; John T. Sheridan; Constantin Th. Coutsomitros
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Paper Abstract

Novel optical sensors for the detection of weak radiation flux transients and mechanical micro-vibrations have been developed. The sensors are based on the modulation of an interference pattern created during the optical interrogation of a thin air cavity similar to a low finesse Fabry-Perot or Fizeau interferometer, formed between two parallel glass holographic plates. In the detection of radiation flux the sensor demonstrates high sensitivity, good stability and a fast response. When adapted to the measurement of mechanical micro-vibrations, high sensitivity at low frequencies can be achieved. In order to understand and optimize sensor performance, the mechanical, thermal and optical characteristics of the devices have been modelled theoretically and with finite element analysis. A principal feature of the devices is their low cost and potential for miniaturization thus making them suitable for a wide range of industrial applications.

Paper Details

Date Published: 18 September 1996
PDF: 12 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250807
Show Author Affiliations
Maurice Patrick Whelan, Institute for Systems, Informatics, and Safety (Italy)
Robert P. Kenny, Institute for Systems, Informatics, and Safety (Italy)
John T. Sheridan, Institute for Systems, Informatics, and Safety (Italy)
Constantin Th. Coutsomitros, Institute for Systems, Informatics, and Safety (Italy)

Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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