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Proceedings Paper

Surface deformation measurement by photothermal deflection technique
Author(s): Mario Bertolotti; Roberto Li Voti; Stefano Paoloni; Concita Sibilia; G. L. Liakhou
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Paper Abstract

The photothermal deflection technique is applied to measure the surface deformation induced by laser absorption at the surface. The theory of the probe beam reflection due to the surface displacement is reviewed. The first experimental results show that this technique is able to measure displacements of a few Angstroms.

Paper Details

Date Published: 18 September 1996
PDF: 9 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250779
Show Author Affiliations
Mario Bertolotti, Univ. degli Studi di Roma La Sapienza (Italy)
Roberto Li Voti, Univ. degli Studi di Roma La Sapienza (Italy)
Stefano Paoloni, Univ. degli Studi di Roma La Sapienza (Italy)
Concita Sibilia, Univ. degli Studi di Roma La Sapienza (Italy)
G. L. Liakhou, Technical Univ. of Moldova (Moldova)

Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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