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Proceedings Paper

Optical flying-height testing of magnetic read-write heads
Author(s): Peter J. de Groot; Leslie L. Deck; James A. Soobitsky; James F. Biegen
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Paper Abstract

Quality control in the production of rigid disk drives depends in part on accurate metrology of the read-write head. We review the established technologies for measuring the distance or flying height between the head and the rotating disk, and propose a new instrument based on polarization interferometry. The new instrument has excellent repeatability, high sensitivity at low flying height and in situ determination of the phase change on reflection.

Paper Details

Date Published: 18 September 1996
PDF: 11 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250775
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)
Leslie L. Deck, Zygo Corp. (United States)
James A. Soobitsky, Zygo Corp. (United States)
James F. Biegen, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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