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Proceedings Paper

Computerized interferometric measurement of surface microstructure
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Paper Abstract

The addition of modern electronics, computers, and software to an interference microscope greatly increases the surface height measurement capability of the interference microscope. The RMS repeatability of surface microstructure measured using a computerized phase-shifting interference microscope can be less than 0.1 nanometer. While phase- shifting interferometry having sub-nanometer height precision has limited dynamic range, the dynamic range of an interference microscope can be extended to hundreds, or even thousands, of microns by using vertical scanning coherence peak sensing techniques. This paper describes the measurement capabilities of an interference microscope employing both phase-shifting phase measurement capability and coherence peak sensing. Typical measurements obtained using phase-shifting and coherence peak sensing are illustrated. Techniques for extending the measurement capability of computerized interference microscopes are discussed.

Paper Details

Date Published: 18 September 1996
PDF: 12 pages
Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250754
Show Author Affiliations
James C. Wyant, WYKO Corp. (United States)
Optical Sciences Ctr./Univ. of Arizona (United States)
Joanna Schmit, WYKO Corp. (United States)
Optical Sciences Ctr./Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 2782:
Optical Inspection and Micromeasurements
Christophe Gorecki, Editor(s)

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