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Proceedings Paper

Compatible CMOS microsystems for automotive and medical applications
Author(s): Ralf Kersjes; W. Mokwa
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Paper Abstract

Integration of sensors and electronics on the same substrates becomes more and more important. CMOS circuit design seems to be the most important technique for the monolithic approach. Compared to bipolar circuits power consumption is much lower, compared to BICMOS the process is much less complex therefore having a much lower number of masks. This is very important because inmost cases monolithic integration means additional process steps and by this a higher process complexity. This paper wants to give a few examples for the monolithic approach in the field of physical sensors based on CMOS-technologies for automotive and for medical applications.

Paper Details

Date Published: 17 September 1996
PDF: 12 pages
Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); doi: 10.1117/12.250703
Show Author Affiliations
Ralf Kersjes, Fraunhofer Institute of Microelectronic Circuits and Systems (Germany)
W. Mokwa, Fraunhofer Institute of Microelectronic Circuits and Systems (Germany)

Published in SPIE Proceedings Vol. 2882:
Micromachined Devices and Components II
Kevin H. Chau; Ray M. Roop, Editor(s)

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