Share Email Print
cover

Proceedings Paper

Design and fabrication of a new tungsten-diamond transmission target for micro-computed tomography
Author(s): Geng Niu; Junbiao Liu; Yutian Ma; Han Li; Weixia Zhao
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The Micro-CT uses X-ray to detect the internal structure of a sample on micro&nano scale without destroying it, the main challenges in manufacturing a high power Micro-CT is a target with fast heat dissipation to produce high power intensity of X-ray. In this manuscript, we introduce our progress in manufacturing a target that can withstand higher power of electron beam than previous. Firstly, Monte-Carlo simulation (Genat4) is constructed to determine the optimal thickness of the tungsten film, which optimize the intensity of X-ray. In addition, we examine heat dissipation of tungsten and aluminum by finite element method and find that diamond is the most suitable material for substrate, because it results in the lowest temperature near the impact point according to our simulation. Thirdly, the magnetron sputtering method is used to fabricate a tungsten film on the diamond substrate. We highlight that the Micro-CT based on this target achieve a high resolution of 3μm, and the power of electron beam is 10 watts. Based on these improvements, the experiments show that our tungsten-diamond target provides much better performance with quicker heat dissipation rate (i.e. with lower temperature near the impact point) and the stronger power of X-ray than previous works.

Paper Details

Date Published: 24 January 2019
PDF: 8 pages
Proc. SPIE 10840, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics, 108400X (24 January 2019); doi: 10.1117/12.2506351
Show Author Affiliations
Geng Niu, Institute of Electrical Engineering (China)
Univ. of Chinese Academy of Sciences (China)
Junbiao Liu, Institute of Electrical Engineering (China)
Univ. of Chinese Academy of Sciences (China)
Yutian Ma, Institute of Electrical Engineering (China)
Han Li, Institute of Electrical Engineering (China)
Univ. of Chinese Academy of Sciences (China)
Weixia Zhao, Institute of Electrical Engineering (China)


Published in SPIE Proceedings Vol. 10840:
9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics
Mingbo Pu; Xiong Li; Bin Fan; Min Gu; Reinhart Poprawe; Xiangang Luo, Editor(s)

© SPIE. Terms of Use
Back to Top