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Proceedings Paper

Optical design of high-aperture lens objectives for NUV and DUV spectral ranges
Author(s): Dmitry N. Frolov; Olga A. Vinogradova; Georgi Burdzhanadze; Liyun Wen
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Paper Abstract

The aspects of the use of dioptric optics for DUV microscopy are considered. The transition to the NUV and DUV range can significantly improve the resolving power of the microscope. Different kinds of crystals can be used as optical materials.

Paper Details

Date Published: 5 November 2018
PDF: 10 pages
Proc. SPIE 10816, Advanced Optical Imaging Technologies, 108161V (5 November 2018); doi: 10.1117/12.2504676
Show Author Affiliations
Dmitry N. Frolov, Project Labor-Microscopes (Russian Federation)
Olga A. Vinogradova, Project Labor-Microscopes (Russian Federation)
Georgi Burdzhanadze, Polytechnic Institute (Georgia)
Liyun Wen, Kozo-Optics Ltd. (China)


Published in SPIE Proceedings Vol. 10816:
Advanced Optical Imaging Technologies
Xiao-Cong Yuan; Kebin Shi; Michael G. Somekh, Editor(s)

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