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Proceedings Paper

Advanced signal processing in a white-light scanning interferometer for exact surface profile measurement
Author(s): Songjie Luo; Osami Sasaki; Samuel Choi; Takamasa Suzuki; Jixiong Pu
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Paper Abstract

Advanced signal processing is required to make exact measurements with nanometer order accuracy. A complex-valued interference signal of a white-light scanning interferometer (WLSI) obtained from the detected real-valued interference signal through Fourier transform provides an accurate position of an object surface with an error less than 4 nm. Moreover, the sampling points of the interference signal of the WLSI detected with a camera are corrected with the measured scanning positions which are obtained from an interference signal detected by using an optical band-pass filter. This correction method provides more accurate surface profiles with an error less than 2 nm. In experiments a surface profile with a step shape of 3 μm-width is measured accurately.

Paper Details

Date Published: 8 November 2018
PDF: 7 pages
Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 108190N (8 November 2018); doi: 10.1117/12.2502790
Show Author Affiliations
Songjie Luo, Niigata Univ. (Japan)
Osami Sasaki, Niigata Univ. (Japan)
Huaqiao Univ. (China)
Samuel Choi, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)
Jixiong Pu, Huaqiao Univ. (China)

Published in SPIE Proceedings Vol. 10819:
Optical Metrology and Inspection for Industrial Applications V
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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