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Proceedings Paper

Excimer laser micromachining for passive fiber coupling to polymeric waveguide devices
Author(s): Bruce L. Booth; James L. Hohman; Kenneth B. Keating; Joseph E. Marchegiano; Sandy L. Witman
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Paper Abstract

The precise control and high-resolution ablation capability inherent in excimer laser machining make it ideally suited for creating slots for passive alignment of optical fibers to planar channel waveguides as well as for direct waveguide-to-waveguide coupling. This paper describes KrF excimer laser generation of passive alignment coupling slots and the results achieved using this technique with Polyguid polymeric integrated optic system single and multimode waveguide coupling.

Paper Details

Date Published: 1 March 1991
PDF: 7 pages
Proc. SPIE 1377, Excimer Laser Materials Processing and Beam Delivery Systems, (1 March 1991); doi: 10.1117/12.25024
Show Author Affiliations
Bruce L. Booth, E.I. du Pont de Nemours & Co., Inc. (United States)
James L. Hohman, E.I. du Pont de Nemours & Co., Inc. (United States)
Kenneth B. Keating, E.I. du Pont de Nemours & Co., Inc. (United States)
Joseph E. Marchegiano, E.I. du Pont de Nemours & Co., Inc. (United States)
Sandy L. Witman, E.I. du Pont de Nemours & Co., Inc. (United States)


Published in SPIE Proceedings Vol. 1377:
Excimer Laser Materials Processing and Beam Delivery Systems
Bernhard P. Piwczyk, Editor(s)

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