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Proceedings Paper

Design and technology of copper comb capacitors
Author(s): M. Szypulski; D. Zarzeczny; T. Lizak; K. Muzyka; A. Kociubiński; M. Prendecka; T. Małecka-Massalska
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Paper Abstract

The article presents the construction and technology of comb capacitors on a polycarbonate substrates. The structures have been designed to be used in the ECIS measurement system that allows monitoring the activity of the examined cells by analyzing the changing electrical parameters impedance, resistance and capacitance in real time. The copper layer was embedded by sputtering method. The resulting comb capacitors were used in a test sample of substances with different chemical properties.

Paper Details

Date Published: 1 October 2018
PDF: 6 pages
Proc. SPIE 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018, 108085N (1 October 2018);
Show Author Affiliations
M. Szypulski, Lublin Univ. of Technology (Poland)
D. Zarzeczny, Lublin Univ. of Technology (Poland)
T. Lizak, Lublin Univ. of Technology (Poland)
K. Muzyka, Lublin Univ. of Technology (Poland)
A. Kociubiński, Lublin Univ. of Technology (Poland)
M. Prendecka, Medical Univ. of Lublin (Poland)
T. Małecka-Massalska, Medical Univ. of Lublin (Poland)


Published in SPIE Proceedings Vol. 10808:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018
Ryszard S. Romaniuk; Maciej Linczuk, Editor(s)

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