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Proceedings Paper

Design and technology of titanium comb capacitor
Author(s): D. Zarzeczny; M. Szypulski; T. Lizak; K. Muzyka; A. Kociubiński; M. Prendecka; T. Małecka-Massalska
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Paper Abstract

This paper presents issues related to the creation of research plates with titanium electrodes, which are a new alternative to currently used plates with gold electrodes. Methods for obtaining metallization of titanium, necessary for the production of electrodes are described. Various lithography techniques are presented for processing the obtained layer of the material. The stages of designing and manufacturing comb capacitors and ready-made research plates have been presented. Finally, substrates with a titanium layer have been designed and manufactured to allow the impedance of living cells to be measured.

Paper Details

Date Published: 1 October 2018
PDF: 6 pages
Proc. SPIE 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018, 1080857 (1 October 2018); doi: 10.1117/12.2501551
Show Author Affiliations
D. Zarzeczny, Lublin Univ. of Technology (Poland)
M. Szypulski, Lublin Univ. of Technology (Poland)
T. Lizak, Lublin Univ. of Technology (Poland)
K. Muzyka, Lublin Univ. of Technology (Poland)
A. Kociubiński, Lublin Univ. of Technology (Poland)
M. Prendecka, Medical Univ. of Lublin (Poland)
T. Małecka-Massalska, Medical Univ. of Lublin (Poland)


Published in SPIE Proceedings Vol. 10808:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2018
Ryszard S. Romaniuk; Maciej Linczuk, Editor(s)

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