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Proceedings Paper

Selection of frequency domain filter based on match of different location-specific points
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Paper Abstract

This study presents an algorithm for automatic selection of a frequency domain filter for the Fourier transform method of interference fringe analysis in a pulse-train interferometer. In this approach, the equality between the interference-fringe envelope peak point and the phase-crossing point of different frequency components is used to distinguish between the signal and noise in the frequency domain. The efficacy of the proposed technique is demonstrated by numerical experiments.

Paper Details

Date Published: 2 November 2018
PDF: 6 pages
Proc. SPIE 10819, Optical Metrology and Inspection for Industrial Applications V, 108191F (2 November 2018); doi: 10.1117/12.2500637
Show Author Affiliations
Dong Wei, Nagaoka Univ. of Technology (Japan)
Kenta Enoki, Nagaoka Univ. of Technology (Japan)
Masato Aketagawa, Nagaoka Univ. of Technology (Japan)

Published in SPIE Proceedings Vol. 10819:
Optical Metrology and Inspection for Industrial Applications V
Sen Han; Toru Yoshizawa; Song Zhang, Editor(s)

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