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Proceedings Paper

MMIC compatible photodetector design and characterization
Author(s): Kyle A. Dallabetta; Michael de la Chapelle; Robert C. Lawrence
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Paper Abstract

Interdigitated photodetectors that are compatible with a standard commercial monolithic microwave integrated circuit (MMIC) process have been designed and characterized. A wide variety of interdigitated metal-semiconductor-metal designs were investigated by varying device geometry and type of contact (Schottky and ohmic). The Schottky photodetector devices exhibited quantum efficiencies between 40 percent and 50 percent with 3 dB bandwidths up to 12 GHz and dark currents less than 5 nA. The fastest device, having 0.5-micron fingers with 1.0-micron spacing, had a useful operating bandwidth up to 40 GHz. The impedance of the photodetectors was measured and equivalent circuit models were derived from the data.

Paper Details

Date Published: 1 February 1991
PDF: 12 pages
Proc. SPIE 1371, High-Frequency Analog Fiber Optic Systems, (1 February 1991); doi: 10.1117/12.24893
Show Author Affiliations
Kyle A. Dallabetta, Boeing Aerospace and Electronics Co. (United States)
Michael de la Chapelle, Boeing Aerospace and Electronics Co. (United States)
Robert C. Lawrence, Boeing Aerospace and Electronics Co. (United States)

Published in SPIE Proceedings Vol. 1371:
High-Frequency Analog Fiber Optic Systems
Paul Sierak, Editor(s)

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