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Proceedings Paper

Carbon super tips on AFM probes as near-field PSTM sensors
Author(s): Michel Castagne; M. Benfedda; S. Lahimer; Jean-Pierre Fillard; L. Grimont
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Paper Abstract

It has now been widely established that AFM probes (silicon as well as silicon nitride) are relaxant devices for the conversion of near field evanescent waves into far field propagating photons. From several points of view these probes seem to be more convenient than the usual tapered optical fibers which makes the tip a really mesoscopic object. Also simultaneous atomic force microscopy (AFM) or shear force microscopy (SFM) topographic images can be acquired containing meaningful information. In this paper we describe consistent experimental results on the capture of the evanescent wave by such probes which have been equipped with a carbon 'super tip' in order for them to attain higher resolution performances especially on the rugged surfaces of semiconductor processed devices. The experiments are performed on an indium phosphide surface in a PSTM configuration at lambda equals 1.06 micrometer. The intensity versus distance curves obey the classical model of optical conversion in spite of the very sharp aspect of the tip. It is also shown that the guiding properties of the super tips leads to a narrower beam output. The capture mechanism involved is discussed.

Paper Details

Date Published: 26 August 1996
PDF: 7 pages
Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248511
Show Author Affiliations
Michel Castagne, Univ. de Montpellier II (France)
M. Benfedda, Univ. de Montpellier II (France)
S. Lahimer, Univ. de Montpellier II (France)
Jean-Pierre Fillard, Univ. de Montpellier II (France)
L. Grimont, Univ. de Montpellier II (France)

Published in SPIE Proceedings Vol. 2783:
Micro-Optical Technologies for Measurement, Sensors, and Microsystems
Olivier M. Parriaux, Editor(s)

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