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Proceedings Paper

Micro-optomechanical devices: an electrostatically actuated bending waveguide for optical coupling
Author(s): Frederic Chollet; Michel de Labachelerie; Hiroyuki Fujita
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Paper Abstract

A novel coupling structure between two waveguides is proposed. We use electromechanical actuation to change the gap between two superimposed waveguides. This in turn allows for evanescent wave coupling to induce complete energy exchange after typical length of 250 micrometers at a wavelength of 0.6328 micrometer. This device should work as a directional coupler and allow out of the plane interconnection opening the way to 3D coupling matrix. We present here the simulations (optical and mechanical) used to evaluate the device behavior and all its relevant geometrical parameters. Development of oxynitride waveguide using low pressure chemical vapor deposition is reported and also the silicon based process compatible with waveguides used to obtain a bending waveguide supporting structure with through-the-wafer contacted electrodes. Finally actuation of bending waveguide is also described and further developments are discussed.

Paper Details

Date Published: 26 August 1996
PDF: 11 pages
Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248485
Show Author Affiliations
Frederic Chollet, Univ. of Tokyo (Japan)
Michel de Labachelerie, LPMO (France)
Hiroyuki Fujita, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 2783:
Micro-Optical Technologies for Measurement, Sensors, and Microsystems
Olivier M. Parriaux, Editor(s)

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