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Proceedings Paper

Integrated motion system for self-alignment of micro-optical devices
Author(s): Dominique Collard; Y. Fukuta; T. Akiyama; Dominique Chauvel; Hiroyuki Fujita
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Paper Abstract

The purpose of this paper is to investigate an integrated X/Y motion system, compatible with silicon process that will allow the positioning of micro-optical devices. The basic actuator, used for this system is referred as scratch drive actuator (SDA). SDA is able to produce a 1-D displacement, so, by combining several SDA, multi-degree of freedom motion is obtained. First, the SDA dimension dependent yield was analyzed. From this study, SDA with 50 micrometer long and 70 micrometer wide scratching area are appropriate for the integrated alignment system. According to these dimensions, various X/Y stages configurations are designed and fabricated as well as other actuated components such as long springs, integrated snapping devices and also nonrectangular shaped SDA. Two-dimensional motion of a 150 micrometer by 150 micrometer polysilicon stage have been demonstrated, proving the SDA out force is able to overcome friction effects of this kind of device. Active snapping system have been also successfully implemented. Control schemes for the X/Y motion and for the alignment are now under investigation.

Paper Details

Date Published: 26 August 1996
PDF: 8 pages
Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248481
Show Author Affiliations
Dominique Collard, Univ. of Tokyo (Japan)
Y. Fukuta, Univ. of Tokyo (Japan)
T. Akiyama, Univ. of Tokyo (Japan)
Dominique Chauvel, Univ. of Tokyo (Japan)
Hiroyuki Fujita, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 2783:
Micro-Optical Technologies for Measurement, Sensors, and Microsystems
Olivier M. Parriaux, Editor(s)

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