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Proceedings Paper

Dependence of the surface morphology and scattering of optical coatings on film material, substrate roughness, and deposition process
Author(s): Stefan Jakobs; Torsten Feigl; Angela Duparre; Stephan Pichlmaier
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Paper Abstract

Substrate properties, coating design, and deposition process determine the surface morphology of optical coatings. The contribution of each factor can be estimated by measuring the surface topography with a scanning force microscope (SFM) and calculating the power spectral density functions. We present results for oxide and fluoride coatings on well polished glass and silicon substrates. The scattering of the coatings is predicted by calculations based on SFM data and compared with results from angle resolved scattering measurements.

Paper Details

Date Published: 19 August 1996
PDF: 11 pages
Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); doi: 10.1117/12.246814
Show Author Affiliations
Stefan Jakobs, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Torsten Feigl, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Angela Duparre, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Stephan Pichlmaier, Friedrich-Schiller-Univ. Jena (Germany)

Published in SPIE Proceedings Vol. 2776:
Developments in Optical Component Coatings
Ian Reid, Editor(s)

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