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Proceedings Paper

SiO2 protective coatings on plastic optics deposited with plasma IAD
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Paper Abstract

Plasma ion assisted deposition was used to deposit SiO2 coatings on polycarbonate and on silicon. To study the influence of ion bombardment during the deposition process the bias voltage as an equivalent for ion energy was varied. At a definite bias value surface microtopography is changed abruptly. Coatings deposited at higher bias voltages show a stable chemical composition and therefore constant optical properties can be expected. It was also found that the barrier effect of coatings against moisture uptake, measured for polycarbonate substrates, increases with bias voltage.

Paper Details

Date Published: 19 August 1996
PDF: 6 pages
Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); doi: 10.1117/12.246810
Show Author Affiliations
Ulrike Schulz, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Stefan Jakobs, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Norbert Kaiser, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)

Published in SPIE Proceedings Vol. 2776:
Developments in Optical Component Coatings
Ian Reid, Editor(s)

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