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Proceedings Paper

Hydrogen/oxygen radio-frequency plasma processing of LiNbO3
Author(s): Hana Turcicova; Jiri Vacik; Jarmila Cervena; Vladimir Zelezny
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Paper Abstract

Lithium niobate substrates were processed in plasma of radio-frequency glow discharge in hydrogen and subsequently in oxygen. The modified surface layers were examined using the infrared spectroscopy and 6Li depth profiling. It was found that hydrogen plasma treatment enhances the OH band absorption which is explained as hydrogenation of Li- reduced samples. At the same time the sample surface is modified so that the reflectivity increases and the extinction coefficient of a wafer is substantially lowered. The Li-reduction is not higher than 50 percent, but the depth of the modified surface layer extends to about 20 micrometers. It is attributed to a relatively high sample heating caused by plasma which facilitates the Li mobility. A possibility of this method as an alternative technique to the annealed proton exchange is mentioned. An interesting reversed 6Li depth profile was observed, i.e. decreasing with depth. The reason of this phenomenon might be a negative surface biasing in plasma, which makes the Li+ ions to drift to the surface. It suggests an idea of thus produced 'buried' waveguide.

Paper Details

Date Published: 19 August 1996
PDF: 9 pages
Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246800
Show Author Affiliations
Hana Turcicova, Institute of Physics (Czech Republic)
Jiri Vacik, Nuclear Physics Institute (Czech Republic)
Jarmila Cervena, Nuclear Physics Institute (Czech Republic)
Vladimir Zelezny, Institute of Physics (Czech Republic)

Published in SPIE Proceedings Vol. 2775:
Specification, Production, and Testing of Optical Components and Systems
Anthony E. Gee; Jean-Francois Houee, Editor(s)

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