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Proceedings Paper

Binary diffractive elements for CO2 laser beam diagnostics
Author(s): Christian Hembd-Soellner; Christel Budzinski; Hans J. Tiziani
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Paper Abstract

Binary diffractive optical elements for beam diagnostics have been calculated and fabricated as reflective phase elements in copper. Our calculation combines electromagnetic theory and Fourier optics for coding phase and amplitude in the diagnostic beam. First the binary structure is fabricated in photoresist. Then a galvanic process is used to transfer these structures in copper. By including spatial filters in the design of the element a compact sensor for beam position is achieved.

Paper Details

Date Published: 19 August 1996
PDF: 8 pages
Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246791
Show Author Affiliations
Christian Hembd-Soellner, Univ. Stuttgart (Germany)
Christel Budzinski, Univ. Stuttgart (Germany)
Hans J. Tiziani, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 2775:
Specification, Production, and Testing of Optical Components and Systems
Anthony E. Gee; Jean-Francois Houee, Editor(s)

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