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Proceedings Paper

Method of shearing interferometry for characterizing non-Gaussian randomly rough surfaces
Author(s): Ivan Ohlidal; Miloslav Ohlidal; Daniel Franta; A. Michalek
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Paper Abstract

In this paper a method of shearing interferometry enabling us to perform a characterization of the basic statistical properties of non-gaussian randomly rough surfaces of solids will be described. This method is based on a statistical analysis of the form of dark fringe centers taking place in interferograms obtained by using a suitable interference microscope. By means of the method the root-mean-square values of heights and slopes, the values of autocorrelation lengths, autocorrelation coefficients of the heights and autocorrelation coefficient of the slopes of surface irregularities of glass diffusers will be determined.

Paper Details

Date Published: 19 August 1996
PDF: 10 pages
Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246771
Show Author Affiliations
Ivan Ohlidal, Masaryk Univ. (Czech Republic)
Miloslav Ohlidal, Technical Univ. (Czech Republic)
Daniel Franta, Masaryk Univ. (Czech Republic)
A. Michalek, Technical Univ. (Czech Republic)

Published in SPIE Proceedings Vol. 2775:
Specification, Production, and Testing of Optical Components and Systems
Anthony E. Gee; Jean-Francois Houee, Editor(s)

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