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Proceedings Paper

Manufacturing error measurement for minute aspherical lens using Mach-Zehnder interferometer
Author(s): Minoru Oshikiri; Kimihiko Nishioka
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Paper Abstract

In recent years we have used several kinds of aspherical lenses in our minute optical system. To assure the lens quality, establishing definite evaluation technique of the aspherical lenses has been required as one of the most important matters. For that purpose, we developed a technique using the Mach-Zehnder interferometer. Mach- Zehnder interferometry has the capability of estimating the total characteristic of an aspherical lens in almost the same situation as the lens is under practical use. However it has difficulty in finding out that what kinds of manufacturing errors exist and how much the errors are. Our method concerns these problems and solves by the following: (1) obtain differential coefficients of Zernike coefficients for the aspherical test sample lens by the computer simulation, giving small manufacturing errors; and (2) separate quantitatively each manufacturing error by solving the first-order-simultaneous-equation constructed with the above differential coefficients and the measured values of the Zernike coefficients.

Paper Details

Date Published: 19 August 1996
PDF: 8 pages
Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246765
Show Author Affiliations
Minoru Oshikiri, Olympus Optical Co., Ltd. (Japan)
Kimihiko Nishioka, Olympus Optical Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 2775:
Specification, Production, and Testing of Optical Components and Systems
Anthony E. Gee; Jean-Francois Houee, Editor(s)

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