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Proceedings Paper

Analysis of interface and volume inhomogeneities in a multilayer system by light scattering methods
Author(s): Stephan Pichlmaier; Karl Hehl; Uwe Schuhmann; Stefan Gliech; Angela Duparre
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Paper Abstract

We investigated thin MgF2/LaF3- and LaF3/MgF2-layers on opaque glass with angle resolved light scattering to analyze the different scattering contributions. We already showed the possibility of separating the volume scattering from the interface contribution for a single MgF2-layer on BK7. In this work we concentrated on layers with thicknesses common for multilayer mirrors in the UV. The roughness of the interfaces was included in the calculations by the power spectral density measured with the atomic force microscope. This has proven to be better than a Gaussian or exponential correlation function ansatz. In order to obtain as much information as possible we also investigated the uncoated substrates and the corresponding single layer systems. We found again that the investigated layers, which have columnar structure, showed generally non-negligible volume scattering. Additionally crosscorrelation between the different interfaces must be taken into consideration.

Paper Details

Date Published: 19 August 1996
PDF: 10 pages
Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); doi: 10.1117/12.246757
Show Author Affiliations
Stephan Pichlmaier, Friedrich-Schiller-Univ. Jena (Germany)
Karl Hehl, Friedrich-Schiller-Univ. Jena (Germany)
Uwe Schuhmann, JENOPTIK Technologie GmbH (Germany)
Stefan Gliech, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)
Angela Duparre, Fraunhofer-Institut fuer Angewandte Optik und Feinmechanik (Germany)

Published in SPIE Proceedings Vol. 2775:
Specification, Production, and Testing of Optical Components and Systems
Anthony E. Gee; Jean-Francois Houee, Editor(s)

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