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Proceedings Paper

Spectroscopic ellipsometry and photometry applied to color filter characterization
Author(s): Christophe Defranoux; Jean-Philippe Piel; Jean-Louis P. Stehle
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Paper Abstract

Thin film color filters have been characterized precisely by spectroscopic ellipsometry and transmittance measurement using the new GESP5 SOPRA instrument. Ellipsometry provides precisely not only the thickness of the layers but also the optical indices of a wide wavelength range. The optical index and the absorption are determined independently to allow accurate determination of thickness and pigment concentration and save costly materials. The quality of the layers can be checked from run to run but also on the same panel making mapping measurements. The spatial resolution around 200 micrometers and precise positioning allow measurement in a single pixel. Using these structural informations the theoretical transmittance of the filters can be deduced and compared to the corresponding experimental measurements made with the same instrument.

Paper Details

Date Published: 16 August 1996
PDF: 4 pages
Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); doi: 10.1117/12.246214
Show Author Affiliations
Christophe Defranoux, SOPRA SA (France)
Jean-Philippe Piel, SOPRA SA (France)
Jean-Louis P. Stehle, SOPRA SA (France)

Published in SPIE Proceedings Vol. 2873:
International Symposium on Polarization Analysis and Applications to Device Technology
Toru Yoshizawa; Hideshi Yokota, Editor(s)

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