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Proceedings Paper

Geometrical library recognition for mask data compression
Author(s): Robert Veltman; Isao Ashida
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Paper Abstract

Recent developments in LSI mask data processing show a tendency towards unpreceded data volume increases. This paper introduces a data compression technique designed to reduce mask data volumes and is based on geometrical library recognition in which a library is defined as a set of patterns that can be referenced as a single object repeated along a 2 dimensional mesh. The data compression technique is referred to as mask data geometrical library recognition compression (MD-GLRC) and includes a newly developed repetition center tracking (RCT) and library inheritance tree (LIT) algorithm. By applying MD-GLRC, a 885 Mbyte 0.25 μm memory device mask data sample was compressed to 7 Mbytes in 3.5 CPU hours on a 135 MIPS workstation.

Paper Details

Date Published: 24 July 1996
PDF: 9 pages
Proc. SPIE 2793, Photomask and X-Ray Mask Technology III, (24 July 1996); doi: 10.1117/12.245219
Show Author Affiliations
Robert Veltman, Sony Semiconductor of America (United States)
Isao Ashida, Sony Corp. (Japan)

Published in SPIE Proceedings Vol. 2793:
Photomask and X-Ray Mask Technology III
Hideo Yoshihara, Editor(s)

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