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Proceedings Paper

High-sensitivity displacement measurement using a novel fiber optic electronically scanned white light interferometer
Author(s): Raymond H. Marshall; Yanong N. Ning; Andrew W. Palmer; Kenneth T. V. Grattan
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Paper Abstract

In recent years, white-light interferometry has been used extensively for the measurement of displacement. In this work, a novel bulk-optical Mach-Zehnder interferometer (MZI) is employed as a processing interferometer in an extrinsic fiber-optic electronically scanned white light interferometer. A Fabry-Perot interferometer was used as the sensing interferometer, whereby one of its mirrors was translated using a linear PZT stage in order to provide the displacement measurand. An electronically-scanned system was employed, which has the advantages of not requiring any moving parts, which in turn increases the mechanical stability of the system. In addition, this bulk-optical MZI configuration has the advantages of being relatively small and compact, and does not require the use of polarizers, unlike some electronically-scanned interferometers--such as Wollaston interferometer. This system has been experimentally realized to provide absolute displacement measurements with a resolution of 40 nm.

Paper Details

Date Published: 19 July 1996
PDF: 10 pages
Proc. SPIE 2861, Laser Interferometry VIII: Applications, (19 July 1996); doi: 10.1117/12.245183
Show Author Affiliations
Raymond H. Marshall, City Univ. (United Kingdom)
Yanong N. Ning, City Univ. (United Kingdom)
Andrew W. Palmer, City Univ. (United Kingdom)
Kenneth T. V. Grattan, City Univ. (United Kingdom)

Published in SPIE Proceedings Vol. 2861:
Laser Interferometry VIII: Applications
Ryszard J. Pryputniewicz; Gordon M. Brown; Werner P. O. Jueptner, Editor(s)

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