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Proceedings Paper

High-efficiency holographic ion-etched gratings with multilayer coatings and operating on-blaze at normal incidence in the 125- to 300-A range
Author(s): John F. Seely; Michael P. Kowalski; Raymond G. Cruddace; Jack C. Rife; Troy W. Barbee Jr.; William R. Hunter; Glenn E. Holland
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Paper Abstract

Multilayer coatings have been applied to holographic diffraction gratings that have ion-etched blazed groove profiles. For each grating, the multilayer coating was designed to match the blaze angle so that the grating had high efficiency near normal incidence and in a wavelength region of choice in the 125-300 angstrom range. The grating efficiencies as functions of wavelength and incidence angle were measured using synchrotron radiation and were compared to the expected results. Normal-incidence efficiencies up to 13 percent were achieved at a wavelength of 128 angstrom. The performance characteristics of multilayer holographic and ruled replica gratings were compared and were related to the shape and roughness of the groove profiles as determined by atomic force microscopy.

Paper Details

Date Published: 19 July 1996
PDF: 8 pages
Proc. SPIE 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III, (19 July 1996); doi: 10.1117/12.245088
Show Author Affiliations
John F. Seely, Naval Research Lab. (United States)
Michael P. Kowalski, Naval Research Lab. (United States)
Raymond G. Cruddace, Naval Research Lab. (United States)
Jack C. Rife, Naval Research Lab. (United States)
Troy W. Barbee Jr., Lawrence Livermore National Lab. (United States)
William R. Hunter, SFA Inc. (United States)
Glenn E. Holland, SFA Inc. (United States)


Published in SPIE Proceedings Vol. 2805:
Multilayer and Grazing Incidence X-Ray/EUV Optics III
Richard B. Hoover; Arthur B. C. Walker II, Editor(s)

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