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Proceedings Paper

Selectively esterified novolac resins: a study of resist properties as a function of novolac molecular weight and composition
Author(s): Alfred T. Jeffries III; David J. Brzozowy; Bernard T. Beauchemin Jr.; Ahmad A. Naiini; Edward A. Fitzgerald; Paula M. Gallagher-Wetmore
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Paper Abstract

Supercritical fluids were used to fractionate a conventional 60 meta/40 para cresol novolac into five narrow polydispersivity fractions. Single and multiple fractions were esterified with a DNQ moiety and recombined to obtain a resist having essentially the same molecular weight and composition as the original parent novolac. Fractions 1 - 4 were esterified. An experimental design was constructed and the resulting selectively esterified novolacs were used to study resist properties as a function of the molecular weight and composition of the esterified fractions. Positive resists prepared from fraction 2 (MW 870 and 69% m-cresol), and fractions 2 and 4 (MW 3064 and 75% m-cresol) exhibited better performance compared to resists prepared from other selectively esterified fractions and the randomly esterified parent novolac.

Paper Details

Date Published: 14 June 1996
PDF: 12 pages
Proc. SPIE 2724, Advances in Resist Technology and Processing XIII, (14 June 1996);
Show Author Affiliations
Alfred T. Jeffries III, Olin Microelectronic Materials (United States)
David J. Brzozowy, Olin Microelectronic Materials (United States)
Bernard T. Beauchemin Jr., Olin Microelectronic Materials (United States)
Ahmad A. Naiini, Olin Microelectronic Materials (United States)
Edward A. Fitzgerald, Olin Microelectronic Materials (United States)
Paula M. Gallagher-Wetmore, Phasex Corp. (United States)

Published in SPIE Proceedings Vol. 2724:
Advances in Resist Technology and Processing XIII
Roderick R. Kunz, Editor(s)

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