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Proceedings Paper

Extremely narrow-bandwidth high-repetition-rate laser for high-NA step-and-scan tools
Author(s): Juergen Kleinschmidt; Rainer Paetzel; Peter Heist; Uwe Stamm; Dirk Basting; Michael W. Powell
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Paper Abstract

In this paper we discuss several resonator designs in terms of bandwidth, efficiency and lifetime of the major optical components. Experimental data are presented for a resonator combining the advantages of a long lifetime grating and etalon elements. Moreover, the limitations of these elements are overcome through the outcoupling scheme, ensuring optimum feedback over gas and tube lifetimes. In addition to low cost-of-ownership, this same resonator provides for an extremely narrow bandwidth ArF excimer laser development, using a single oscillator.

Paper Details

Date Published: 7 June 1996
PDF: 10 pages
Proc. SPIE 2726, Optical Microlithography IX, (7 June 1996);
Show Author Affiliations
Juergen Kleinschmidt, Lambda Physik GmbH (Germany)
Rainer Paetzel, Lambda Physik GmbH (Germany)
Peter Heist, Lambda Physik GmbH (Germany)
Uwe Stamm, Lambda Physik GmbH (Germany)
Dirk Basting, Lambda Physik GmbH (Germany)
Michael W. Powell, Lambda Physik, Inc. (Germany)

Published in SPIE Proceedings Vol. 2726:
Optical Microlithography IX
Gene E. Fuller, Editor(s)

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