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Proceedings Paper

Ion-assisted deposition of optical coatings
Author(s): Zhengxiu Fan; Rui-Ying Fan; Xuefei Tang
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Paper Abstract

Ion assisted deposition technique and effects of this technique on properties of optical coatings are investigated in this paper. We have produced thin-film samples by bombarding with different ions such as oxygen, argon and mixture of the two during deposition, of which the refractive index, the extinctive coefficient and the laser induced damage threshold are analyzed in detail.

Paper Details

Date Published: 27 May 1996
PDF: 4 pages
Proc. SPIE 2714, 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, (27 May 1996); doi: 10.1117/12.240422
Show Author Affiliations
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)
Rui-Ying Fan, Shanghai Institute of Optics and Fine Mechanics (China)
Xuefei Tang, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 2714:
27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995
Harold E. Bennett; Arthur H. Guenther; Mark R. Kozlowski; Brian Emerson Newnam; M. J. Soileau, Editor(s)

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