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Proceedings Paper

Self-calibration in two dimensions: the experiment
Author(s): Michael T. Takac; Jun Ye; Michael R. Raugh; Roger Fabian W. Pease; C. Neil Berglund; Gerry Owen
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Paper Abstract

A two-dimensional self-calibration experiment obtains Cartesian traceability for high-precision tools. The calibration procedure incorporates group theory principles to solve our industry's two-dimensional calibration problem. With group theory, a Cartesian system is obtainable through mathematics; thus, eliminating the need for any certified standards. The calibration algorithm was developed by Jun Ye at Stanford University and funded by the Semiconductor Research Corporation (SRC) with collaboration from Hewlett Packard (HP) and IBM. The data was collected from Leica's LMS2000 and LMS2020 systems.

Paper Details

Date Published: 21 May 1996
PDF: 17 pages
Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996);
Show Author Affiliations
Michael T. Takac, IBM Corp. (United States)
Jun Ye, KLA Instruments Corp. (United States)
Michael R. Raugh, Interconnect Technologies Corp. (United States)
Roger Fabian W. Pease, Stanford Univ. (United States)
C. Neil Berglund, Oregon Graduate Institute of Science and Technology (United States)
Gerry Owen, Hewlett-Packard Lab. (United States)

Published in SPIE Proceedings Vol. 2725:
Metrology, Inspection, and Process Control for Microlithography X
Susan K. Jones, Editor(s)

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