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Proceedings Paper

Lithography applications of the new Tencor Surfscan AIT laser-based defect inspection system
Author(s): Ian Preston Lincoln; Rebecca S. Howland; Keith B. Wells
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Paper Details

Date Published: 21 May 1996
PDF: 4 pages
Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996);
Show Author Affiliations
Ian Preston Lincoln, Tencor Instruments (United States)
Rebecca S. Howland, Tencor Instruments (United States)
Keith B. Wells, Tencor Instruments (United States)


Published in SPIE Proceedings Vol. 2725:
Metrology, Inspection, and Process Control for Microlithography X
Susan K. Jones, Editor(s)

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