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Proceedings Paper

High-precision submicrometer length measurements by laser interference diffractometry
Author(s): Larisa Yu. Abramova; Victor M. Baratov; Leonid F. Vitushkin; Artem L. Vitushkin; Vladimir I. Korotkov; Sergey Pul'kin
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Paper Abstract

The new method and new set-up are developed for accurate (approximately 1 divided by 5%) measurement of the width of submicrometer structures (slit, groove, wire). The method is based on the measurement of the shifts of the interference fringes depending on the width of structure. The interference pattern is obtained by interference of the diffracted beams in a two- beam interferometer. The comparison of the shifts of the fringes from reference and investigated width is made.

Paper Details

Date Published: 6 May 1996
PDF: 11 pages
Proc. SPIE 2799, Atomic and Quantum Optics: High-Precision Measurements, (6 May 1996); doi: 10.1117/12.239865
Show Author Affiliations
Larisa Yu. Abramova, Mendeleyev Institute for Metrology (Russia)
Victor M. Baratov, Mendeleyev Institute for Metrology (Russia)
Leonid F. Vitushkin, Mendeleyev Institute for Metrology (Russia)
Artem L. Vitushkin, Mendeleyev Institute for Metrology (Russia)
Vladimir I. Korotkov, Mendeleyev Institute for Metrology (Russia)
Sergey Pul'kin, Mendeleyev Institute for Metrology (Russia)

Published in SPIE Proceedings Vol. 2799:
Atomic and Quantum Optics: High-Precision Measurements
Sergei N. Bagayev; Anatoly S. Chirkin, Editor(s)

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