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Proceedings Paper

Two-coordinate laser measuring system for scanning tunneling and atomic-force microscopes
Author(s): V. M. Khavinson; L. F. Khavinson
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Paper Abstract

The optical train and design of an automated two-coordinate laser polarization interferometer to measure linear displacements in the nanometer range are discussed. The interferometer can be used for two-coordinate measurements of displacements of the needle of scanning tunneling or atomic-force microscopes in the study of surface topology.

Paper Details

Date Published: 6 May 1996
PDF: 5 pages
Proc. SPIE 2799, Atomic and Quantum Optics: High-Precision Measurements, (6 May 1996); doi: 10.1117/12.239864
Show Author Affiliations
V. M. Khavinson, Mendeleev Institute for Metrology (Russia)
L. F. Khavinson, Mendeleev Institute for Metrology (Russia)


Published in SPIE Proceedings Vol. 2799:
Atomic and Quantum Optics: High-Precision Measurements
Sergei N. Bagayev; Anatoly S. Chirkin, Editor(s)

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