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Proceedings Paper

Binary-optic reflection grating for an imaging spectrometer
Author(s): Daniel W. Wilson; Paul D. Maker; Richard E. Muller
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Paper Abstract

A single optical element capable of both wavelength dispersion and imaging would be useful for implementing compact imaging spectrometers. We have fabricated a hybrid refractive/diffractive element that accomplishes these goals. The element is a plano-convex glass lens with a reflective diffractive surface fabricated on the planar side. The diffractive surface combines a blazed grating and several forms of aberration correction. The surface relief profile was fabricated in poly-methyl methacrylate (PMMA) by direct-write electron beam (E-beam) lithography followed by a single development step. The 8.2 mm X 8.2 mm exposure pattern was corrected for both the nonlinear dose response of the PMMA and the E-beam proximity effect. Surface characterization by atomic force microscopy revealed that the grating blaze profile was linear, although the grating was overetched. Optical characterization included diffraction efficiency measurements, knife-edge spot size measurements, and CCD spot irradiance profiles at multiple wavelengths and field positions. The measured spot and field sizes translate to a resolution of 65 wavelength channels in the 400 to 700 nm band of interest and 128 spots along the imaging direction for a 10 mm entrance slit.

Paper Details

Date Published: 7 May 1996
PDF: 12 pages
Proc. SPIE 2689, Diffractive and Holographic Optics Technology III, (7 May 1996); doi: 10.1117/12.239629
Show Author Affiliations
Daniel W. Wilson, Jet Propulsion Lab. (United States)
Paul D. Maker, Jet Propulsion Lab. (United States)
Richard E. Muller, Jet Propulsion Lab. (United States)

Published in SPIE Proceedings Vol. 2689:
Diffractive and Holographic Optics Technology III
Ivan Cindrich; Sing H. Lee, Editor(s)

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