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Proceedings Paper

Capability of piezoceramic-driven probe techniques for manufacturing of nanostructures
Author(s): Herbert Pagnia
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Paper Abstract

This contribution is concerned with the question of if the scanning tunneling microscope (STM) or possibly its relatives out of the group of the diverse scanning probe microscopes (SPM) developed in recent years are reliable tools for atomic scale -- or at least nanometric -- modifications of solid state surfaces or for building structures on it, especially for various purposes like (1) high-density memory storage, (2) nanolithography, or more general: (3) nanofabrication and (4) atom and molecule manipulation. From these points of view the last years results are reviewed.

Paper Details

Date Published: 8 April 1996
PDF: 10 pages
Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238196
Show Author Affiliations
Herbert Pagnia, Technishe Hochschule Darmstadt (Germany)

Published in SPIE Proceedings Vol. 2780:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Benedykt W. Licznerski; Andrzej Dziedzic, Editor(s)

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