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Proceedings Paper

AFM with piezoresistive Wheatstone bridge cantilever: noise performance and applications in contact and noncontact mode
Author(s): Teodor Gotszalk; R. Linnemann; Ivo W. Rangelow; Piotr Dumania; Piotr B. Grabiec
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Paper Abstract

The atomic force microscope (AFM) is a very sensitive instrument to examine the topography of surfaces and their properties. The sensitivity of the AFM depends on the choice of the detector system, which is used to observe the cantilever deflection. A cantilever with integrated Wheatstone piezoresistive bridge as a deflection sensor was used in experiments. We describe noise properties of the piezoresistive Wheatstone bridge cantilever and show examples of topography measurements in contact and noncontact mode.

Paper Details

Date Published: 8 April 1996
PDF: 4 pages
Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238192
Show Author Affiliations
Teodor Gotszalk, Technical Univ. of Wroclaw (Poland)
R. Linnemann, Univ. of Kassel (Germany)
Ivo W. Rangelow, Univ. of Kassel (Germany)
Piotr Dumania, Institute of Electronic Technology (Poland)
Piotr B. Grabiec, Institute of Electronic Technology (Poland)

Published in SPIE Proceedings Vol. 2780:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Benedykt W. Licznerski; Andrzej Dziedzic, Editor(s)

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