Unbalanced electromagnetron operated in Ar/n-hexane mixture was employed for deposition of composite Ag/C:H films. For comparison composite Ni/C:H films were prepared in a similar way using unbalanced planar magnetron with permanent magnets. Optical transmission measurements, TEM micrographs, and dc electrical measurements, were used to study ageing effects of the composites in the ambient atmosphere.

Date Published: 8 April 1996
PDF: 3 pages
Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238131

Published in SPIE Proceedings Vol. 2780:
Metal/Nonmetal Microsystems: Physics, Technology, and Applications
Benedykt W. Licznerski; Andrzej Dziedzic, Editor(s)