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Proceedings Paper

Nanostructuring of laser-deposited thin films
Author(s): Wolfgang Pompe; Andre A. Gorbunov
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Paper Abstract

Pulsed laser deposition (PLD) is an advantageous technique for preparation of metastable thin films for application as a material for nanofabrication technology. Crossed beam pulsed laser deposition has the advantage of a droplet-free plasma with a filtered energy distribution of the plasma particles. Different kinds of nanostructuring of thin films deposited by PLD have been investigated. By localized laser annealing of thin films deposited as a supersaturated solid Fe- C solution a disperse structure of quasi periodically arranged Fe-rich ferromagnetic particles of 500 nm diameter can be produced. By scanning tunneling microprocessing periodic rows of hillocks with 20 - 30 nm in lateral size can be grown on metastable Ni-C multilayers. The optical near-field enhancement of laser radiation near a silver tip of a scanning tunneling microscope has been used for nanostructuring of thin gold films with lateral resolution below the diffraction limit. On the example of localized oxidation of ultrathin titanium films it has been shown that by using the nonlinearity of laserchemical reactions nanostructured metal oxides can be grown by laser scanning with lateral size below the diffraction limit.

Paper Details

Date Published: 8 April 1996
PDF: 10 pages
Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); doi: 10.1117/12.237756
Show Author Affiliations
Wolfgang Pompe, Technische Univ. Dresden (Germany)
Andre A. Gorbunov, Technische Univ. Dresden (Germany)

Published in SPIE Proceedings Vol. 2703:
Lasers as Tools for Manufacturing of Durable Goods and Microelectronics
Jan J. Dubowski; Jyotirmoy Mazumder; Leonard R. Migliore; Chandrasekhar Roychoudhuri; Ronald D. Schaeffer, Editor(s)

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