Share Email Print

Proceedings Paper

Automated beam manipulation in UV laser systems
Author(s): Warren O. Jackson; Jay A. Guerette
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The unique challenges of UV laser micromachining require an advanced approach to beam shaping and steering to maximize beam utilization and efficiency. As UV laser systems used in manufacturing proliferate, it is also important to streamline optical setup and operation, and move towards automation. We will discuss the use of motor and actuator control in beam delivery, and how these tools, such as motorized imaging or turning optics, and mask or shaping devices, enable UV laser systems to become more powerful and flexible, yet remain simple to use.

Paper Details

Date Published: 8 April 1996
PDF: 8 pages
Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); doi: 10.1117/12.237748
Show Author Affiliations
Warren O. Jackson, Resonetics, Inc. (United States)
Jay A. Guerette, Resonetics, Inc. (United States)

Published in SPIE Proceedings Vol. 2703:
Lasers as Tools for Manufacturing of Durable Goods and Microelectronics
Jan J. Dubowski; Jyotirmoy Mazumder; Leonard R. Migliore; Chandrasekhar Roychoudhuri; Ronald D. Schaeffer, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?