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Proceedings Paper

Real-time mass-spectrometry of laser-induced chemical reactions
Author(s): Matthias Rossberg; Vladimir K. Popov; E. Linke
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Paper Abstract

The principle of a setup for realtime mass-spectrometry of gas phase reactions is described. An orifice between the high pressure (about 200 Pa) reaction cell and the quadrupol mass spectrometer reduces the pressure and controls some important performance parameter. . With this method it is also possible to investigate the kinetics of laser-induced gas/surface reactions. Some results for C02laser-induced reactions in the system SF6/Si are presented. 1.

Paper Details

Date Published: 1 October 1990
PDF: 7 pages
Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); doi: 10.1117/12.23711
Show Author Affiliations
Matthias Rossberg, Central Institute of Physical (Germany)
Vladimir K. Popov, Scientific Research Ctr. of Technological Lasers (Russia)
E. Linke, Central Institute of Physical Chemistry (Germany)

Published in SPIE Proceedings Vol. 1352:
1st Intl School on Laser Surface Microprocessing
Ian W. Boyd; Vitali I. Konov; Boris S. Luk'yanchuk, Editor(s)

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