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Proceedings Paper

Influence of KrF radiation on surface properties of alumina
Author(s): Gines Nicolas; Michel L. Autric
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Paper Abstract

Numerous surface modifications take place during the irradiation of an alumina ceramic by a KrF excimer laser. So the aim of this work therefore is to investigate these modifications in order to control and improve the final properties of the irradiated material for possible industrial applications. Furthermore, the understanding of fundamental processes involved in the interaction is necessary to explain the phenomena observed. Here we describe the surface topography showing the modifications versus irradiation conditions. However, depending on the irradiation parameters and the surrounding atmosphere, the laser treatment leads to quite different results. One of these is the metallization of irradiated surfaces with an electrical conductivity which is not negligible on these regions. The formation of conducting patterns allows an electroless deposition with an excellent adherence and hence demonstrates potential uses in microelectronics applications.

Paper Details

Date Published: 29 March 1996
PDF: 6 pages
Proc. SPIE 2702, Gas and Chemical Lasers, (29 March 1996); doi: 10.1117/12.236878
Show Author Affiliations
Gines Nicolas, IRPHE (France)
Michel L. Autric, IRPHE (France)

Published in SPIE Proceedings Vol. 2702:
Gas and Chemical Lasers
Robert C. Sze, Editor(s)

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