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Proceedings Paper

Integrated optic devices using micromachined metal membranes
Author(s): Gregory A. Magel
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Paper Abstract

Metal membranes fabricated using a surface micromachining process can be integrated with passive optical waveguides on silicon substrates to form active devices. Electrostatic actuation of a membrane into contact with a waveguide alters both the real and imaginary parts of the propagation constant of the guided mode. This effect has been used to demonstrate both on-off and routing type integrated optic switches, and has potential application to other devices such as variable attenuators and tunable Bragg filters.

Paper Details

Date Published: 25 March 1996
PDF: 10 pages
Proc. SPIE 2686, Integrated Optics and Microstructures III, (25 March 1996); doi: 10.1117/12.236141
Show Author Affiliations
Gregory A. Magel, Texas Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 2686:
Integrated Optics and Microstructures III
Massood Tabib-Azar, Editor(s)

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